Specialized metallurgical processes – compositions for use therei – Processes – Producing or purifying free metal powder or producing or...
Reexamination Certificate
2008-04-22
2008-04-22
Wyszomierski, George (Department: 1793)
Specialized metallurgical processes, compositions for use therei
Processes
Producing or purifying free metal powder or producing or...
C075S354000, C977S889000
Reexamination Certificate
active
07361204
ABSTRACT:
Methods, systems and apparatus for producing a variable, known number of nanoparticles of various materials in an expanding mist in a vacuum or enclosure. The configurations allow for this mist of small particles to be produced in bursts, at repetition rates over a wide range of frequencies. The technique produces an isotropically expanding mist of particles. Direct applications of the invention can be used for the development of high power short wavelength incoherent light sources for applications in EUV lithography (EUVL), advanced microscopy, precision metrology, and other fields.
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Koay Chiew-Seng
Richardson Martin
Takenoshita Kazutoshi
Law Offices of Brian S. Steinberger , P.A.
Research Foundation of the University of Central Florida
Steinberger Brian S.
Wood Phyllis K.
Wyszomierski George
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