Generation of holographic diffraction patterns

Details Generation of holographic diffraction patterns Generation of holographic diffraction patterns

2011-07-12

2011-07-12

Allen, Stephone B (Department: 2872)

Optical: systems and elements

Holographic system or element

For synthetically generating a hologram

C359S022000

Reexamination Certificate

active

07978386

ABSTRACT:
A method of generating a holographic diffraction pattern and a holographic lithography system. The method involves defining at least one geometrical shape; generating at least one line segment to represent the at least one geometrical shape; calculating a line diffraction pattern on a hologram plane, including calculating the Fresnel diffraction equation for an impulse representing the at least one line segment with a line width control term and a line length control term; and adding vectorially, where there are two or more line segments, the line diffraction patterns to form the holographic diffraction pattern. The method and system enables holographic masks to be generated without creating a physical object to record. The required shapes or patterns are defined in terms of a three-dimensional coordinate space and a holographic pattern is generated at a defined distance from the shapes in the coordinate space.

REFERENCES:
XP-002359760—Computer-generated holograms of three-dimensional objects composed of line segments, Ch. Frère, D. Leseberg, and O. Bryngdahl, Optical Society of America/vol. 3, No. 5/May 1986, pp. 726-730.
XP-002359761—Computer-Generated Holograms: Reconstruction of Curves in 3-D, Christian Frère and Olof Bryngdahl, Optics Communications, vol. 60, No. 6, Dec. 1986, pp. 369-372.
XP-00284785—A Technique for projection x-ray lithography using computer-generated holograms, Chris Jacobsen and Malcolm R. Howells, Journal of Applied Physics 71 (1992) Mar. 15, No. 6, New York, pp. 2993-3001.
XP-000638749—Wafer Through-Hole Interconnections with High Vertical Wiring Densities, Carsten Christensen, Member, IEEE, Peter Kersten, Sascha Henke, and Siebe Bouwstra, IEEE Transactions on Components, Packaging and Manufacturing Technology—Part A, vol. 19, No. 4, Dec. 1996, pp. 516-521.
XP-002359762—Nonplanar photolithography with computer-generated holograms, A. Maiden, R. McWilliam, A. Purvis and S. Johnson, Optical Society of America, Optics Letters/vol. 30, No. 11/Jun. 1, 2005, pp. 1300-1302.

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