Generation of electrolytically active water and wet process of a

Details Generation of electrolytically active water and wet process of a Generation of electrolytically active water and wet process of a

1997-04-08

1998-10-20

Gorgos, Kathryn L.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C25B 900

Patent

active

058242007

ABSTRACT:
There is provided a method of, and an apparatus for obtaining electrolytically activated water having stable characteristics comprising steps of bringing a gas containing at least one of chlorine, hydrogen chloride, hydrogen bromide and hydrogen iodide into contact with a liquid in an anode cell of an electrolytic cell or a liquid supplied thereto and/or bringing ammonia into contact with a liquid in a cathode cell of the electrolytic cell, or a liquid supplied thereto to dissolve the gas to thereby electrolyze this liquid. The resulting electrolytically activated water is optimal as the wet treating solution adapted for semiconductor substrate.

REFERENCES:
patent: 4039421 (1977-08-01), Mas
patent: 4324635 (1982-04-01), Sweeney
patent: 4902397 (1990-02-01), Kelham
patent: 5122239 (1992-06-01), McElroy et al.
patent: 5242564 (1993-09-01), Traini
patent: 5411641 (1995-05-01), Trainham, III et al.
G. Valensi et al., "Chlorine", Section 20.2, pp. 590-603.

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