Generation of a library of periodic grating diffraction signals

Details Generation of a library of periodic grating diffraction signals Generation of a library of periodic grating diffraction signals

2007-10-02

2007-10-02

Punnoose, Roy M. (Department: 2886)

Optics: measuring and testing

Dimension

C356S328000

Reexamination Certificate

active

11189161

ABSTRACT:
A method of generating a library of simulated-differentiation signals (simulated signals of a periodic grating includes obtaining a measured-diffraction signal (measured signal). Hypothetical parameters are associated with a hypothetical profile. The hypothetical parameters are varied within a range to generate a set of hypothetical profiles. The range to vary the hypothetical parameters is adjusted based on the measured signal. A set of simulated signals is generated from the set of hypothetical profiles.

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