Generation of a library of periodic grating diffraction signals

Details Generation of a library of periodic grating diffraction signals Generation of a library of periodic grating diffraction signals

2005-09-13

2005-09-13

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Dimension

C356S328000, C356S601000, C250S559220, C702S155000

Reexamination Certificate

active

06943900

ABSTRACT:
A method of generating a library of simulated-diffraction signals (simulated signals) of a periodic grating includes obtaining a measured-diffraction signal (measured signal). Hypothetical parameters are associated with a hypothetical profile. The hypothetical parameters are varied within a range to generate a set of hypothetical profiles. The range to vary the hypothetical parameters is adjusted based on the measured signal. A set of simulated signals is generated from the set of hypothetical profiles.

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