Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-07-19
2009-11-17
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07619746
ABSTRACT:
A method is disclosed which includes, for each of multiple areas of a test surface on a test object having different reflectivities, using an interferometry system to measure each area in a first mode of operation that measures information about the reflectivity of the area over a range of angles and wavelengths; using the same interferometry-system to measure the test surface in a second mode of operation that interferometrically profiles a topography of the test surface over a range including at least some of the multiple areas; and correcting the profile based on the information about the reflectivity of the multiple areas to reduce errors.
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Fish & Richardson P.C.
Lyons Michael A
Zygo Corporation
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