Optical waveguides – Planar optical waveguide
Reexamination Certificate
2005-09-19
2009-10-06
Wood, Kevin S (Department: 2874)
Optical waveguides
Planar optical waveguide
C385S131000, C257S019000
Reexamination Certificate
active
07599593
ABSTRACT:
Si—Ge quantum wells where the well material has a lowest conduction band energy minimum at k=0 (the Γ point of the first Brillouin zone) are provided. Quantum well structures that satisfy this condition have “Kane-like” bands at and near k=0 which can provide physical effects useful for various device applications, especially optical modulators. In the Si1−xGexmaterial system, this condition on the band structure is satisfied for x greater than about 0.7. The quantum well barrier composition may or may not have Kane-like bands. A preferred method of providing such quantum well structures on a substrate (e.g., a silicon substrate) is to grow a first Ge-rich Si—Ge buffer layer on the substrate, and then anneal the resulting layered structure. In many cases it is further preferred to grow a second Ge-rich Si—Ge buffer layer on top of the first buffer layer and anneal the resulting layered structure.
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Richard A. Soref, “Silicon-based group IV heterostructures for optoelectronic applications,” J. Vac. Sci. Techno. A 14(3), May/Jun. 1996, pp. 913-918.
Harris, Jr. James S.
Kuo Yu-Hsuan
Miller David A. B.
Lumen Patent Firm
The Board of Trustees of the Leland Stanford Junior University
Wood Kevin S
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