Measuring and testing – Instrument proving or calibrating – Displacement – motion – distance – or position
Patent
1998-06-30
2000-01-18
Noland, Thomas P.
Measuring and testing
Instrument proving or calibrating
Displacement, motion, distance, or position
33502, 33567, G01B 506
Patent
active
060148861
ABSTRACT:
A gauge block holder that greatly reduces measurement error in calibrating wafer thickness test equipment is described. In a preferred embodiment of the invention, the gauge block holder is compatible with present thickness measurement equipment and provides a central region specially configured for holding a prior art gauge block in a manner that ensures precise, parallel alignment thereof with the equipment and thus precise perpendicular alignment with the equipment's opposing contact pins. Preferably a gauge block-sized and shaped recess and aperture are provided centrally in the holder such that the gauge block rests immobile on and parallel with the precision-machined, planar upper surface of a metal plate of the thickness tester while the thickness tester is being calibrated for a given wafer thickness measurement. The recess and aperture in accordance with their preferred embodiment are rectangular, and the invented gauge block preferably is securely fastened to the metal plate, e.g. with screws, although alternative configurations and fasteners are contemplated for accurate, repeatable calibration with alternative gauge blocks.
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Anderson Douglas G.
Jordan Jason D.
Noland Thomas P.
SEH America Inc.
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