Gating grid and method of manufacture

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens

Reexamination Certificate

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Details

C250S286000, C250S287000, C250S281000, C250S293000, C313S348000, C438S927000, C438S977000, C029S825000, C029S603150

Reexamination Certificate

active

07569835

ABSTRACT:
The present invention relates generally to grids for gating a stream of charged particles and methods for manufacturing the same. In one embodiment, the present invention relates to a Bradbury-Nielson gate having transmission line grid elements. In one embodiment is a feed structure for a gating grid where a drive source is coupled to a feeding transmission line with the same geometry as the chopper and continues with the same geometry to a termination transmission line. Also included is a method for fabricating a gate for charged particles which includes micromachining at least two gate elements from at least one wafer, wherein each gate element includes at least one grid element; metalizing the grid elements; and assembling the gate elements such that the grid elements of the gate elements are interleaved, thereby forming a Bradbury Nielson gate.

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Vlasak, P.R., et al., “An Interleaved Comb Ion Deflection Gate form/zSelection in Time-of-Flight Mass Spectrometry,”Rev. Sci. Instrum., 67(1):68-72 (1996).
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