Gate valve for vacuum processing apparatus

Details Gate valve for vacuum processing apparatus Gate valve for vacuum processing apparatus

1985-01-28

1988-06-28

Yeung, James C.

Valves and valve actuation

With means to increase head and seat contact pressure

With positive reduction

251 56, 251298, 251193, F16K 2500

Patent

active

047534176

ABSTRACT:
A gate valve for sealing an opening in the wall of a vacuum processing chamber is disclosed. The valve includes a gate having a pair of wheels mounted on opposite ends of the gate and a curved track aligned and shaped to guide the wheels through an angle so that the plane of the gate is rotated out of the path of substrates as the gate moves between its sealing and open positions. The curvature of the track should be sufficient to rotate the gate through an angle of at least 60.degree., and preferably 75.degree. to 105.degree., in order to minimize the dimension of the chamber normal to the direction of substrate travel.

REFERENCES:
patent: 653600 (1900-07-01), Wiley
patent: 1325303 (1919-12-01), McGill
patent: 1592986 (1926-07-01), Martin
patent: 3258243 (1966-06-01), Bryant
patent: 3641973 (1972-02-01), Shrader
patent: 3656454 (1972-04-01), Schrader
patent: 3720229 (1973-03-01), Masson et al.
patent: 4065097 (1977-12-01), Timin
patent: 4291891 (1981-09-01), Faria
patent: 4470579 (1984-09-01), Schertler

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