Valves and valve actuation – With means to increase head and seat contact pressure – With positive reduction
Reexamination Certificate
1999-12-06
2001-10-16
Kaufman, Joseph A. (Department: 3754)
Valves and valve actuation
With means to increase head and seat contact pressure
With positive reduction
C251S195000, C251S062000
Reexamination Certificate
active
06302372
ABSTRACT:
INTRODUCTION AND BACKGROUND
The present invention concerns a gate valve to simultaneously shut off or clear two rectangular passage openings that are provided between two vacuum chambers which are aligned with one another and which have a low height and a large width on the order of magnitude of up to several meters, wherein the gate valve has two valve plates opposite one another to close the passage openings.
Gate valves of the preceding type are needed, for example, in sputtering units in which glass passes several vacuum chambers placed one behind the other to be coated with an antireflection layer, for example, by sputtering. In such production units several vacuum chambers are constructed mostly as sputtering chambers. A one-gate chamber and many times also a buffer chamber are connected upstream from it, such that it is necessary for the glass to be able to move into the pertinent chamber via passage openings that can be closed.
Up to now the passage openings have been closed by flaps or traditional sliders. Since the passage openings, however, can be several meters wide, in the manufacturing of glass, for example, the sealing of such flaps or sliders causes difficulties. With flaps there is the problem that their swivel axis must run precisely parallel to the passage opening so that the flap lies uniformly against the sealing over its entire length. With sliders there is wear and tear due to the friction of the sliders on the seals and thus there are leaks in the course of time.
Therefore, it is an object of the invention to overcome the problem of constructing a gate valve of the type described herein so that, with the least possible expense, a reliable sealing is attained and its tightness is impaired as little as possible by wear and tear.
SUMMARY OF THE INVENTION
The above and other objects of the invention can be achieved by having the valve plates as a component of a slider that is placed so that it can move with free play from a position that clears the passage openings into a position which closes the passage openings, and by having at least one pressure-impinged lifting element on the slider to move the valve plates to the closing position.
When a slider moves in front of the passage openings to be sealed off or when clearing these passage openings, such a slider does not have to move along the seals. Therefore, there is no wear and tear of the seals because of the slider movements. Since the valve plates move toward the passage openings only after the movement of the slider, the seals on the valve plates are merely compressed, so that a sliding friction leading to wear and tear is avoided. At the same time, the lifting of the valve plates directed toward the passage openings makes it possible for them to adapt to the course of the passage openings or a component near there, so that alignment errors between the slider and the passage opening can be compensated for. Instead of providing the gate valve with two opposite valve plates, it is also possible to have an embodiment with a valve plate and a counterplate.
REFERENCES:
patent: 2496451 (1950-02-01), Eichenberg
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patent: 4157169 (1979-06-01), Norman
patent: 4418646 (1983-12-01), Zajac
patent: 5087017 (1992-02-01), Sawa et al.
patent: 5157851 (1992-10-01), Younan
patent: 5269491 (1993-12-01), Reynolds
patent: 5755255 (1998-05-01), Iwabuchi
patent: 5975492 (1999-11-01), Brenes
patent: 0 060 626 (1982-09-01), None
Patent Abstracts of Japan, Publication No. 07 062 537 A, published Mar. 7, 1995.
Joos Gerhard
Kunz Johannes
Sauer Andreas
Schuhmacher Manfred
Beybold Systems GmbH
Kaufman Joseph A.
Keasel Eric
Smith , Gambrell & Russell, LLP
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