1984-06-18
1986-10-07
Edlow, Martin H.
357 86, 357 49, 357 47, 357 42, H01L 2978
Patent
active
046162437
ABSTRACT:
This invention relates to a protection device of a semiconductor device. The present invention can prevent the drop of a gate breakdown voltage due to miniaturization of a device without impeding the high speed performance of the circuit attached thereto. The invention improves the voltage that can be applied to the input terminal of the device by reducing the surface breakdown voltage of a surface breakdown type MOS transistor, which is a principal member of a protection device, and reducing the resistance after the breakdown. This can be accomplished, for example, by increasing the concentration of a region in which the MOS transistor is disposed, by reducing the depth of the region, and so forth.
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Masuhara Toshiaki
Minato Osamu
Sasaki Toshio
Edlow Martin H.
Hitachi , Ltd.
Mintel William
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