Gate electrodes and matrix lines made of W/Ta alloy for LCD appa

Details Gate electrodes and matrix lines made of W/Ta alloy for LCD appa Gate electrodes and matrix lines made of W/Ta alloy for LCD appa

1997-03-27

1999-06-29

Abraham, Fetsum

Active solid-state devices (e.g., transistors, solid-state diode

Non-single crystal, or recrystallized, semiconductor...

Amorphous semiconductor material

257 59, 257 72, 257 53, 257771, 257763, 257764, H01L 2144

Patent

active

059171987

ABSTRACT:
A conductive material comprises a tungsten and tantalum alloy including approximately 1 to 5 atm percent of tantalum.

REFERENCES:
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patent: 5336638 (1994-08-01), Suzuki et al.
patent: 5431773 (1995-07-01), Ikeda et al.
patent: 5675185 (1997-10-01), Chen et al.
patent: 5736750 (1998-04-01), Yamazaki et al.
M. Ikeda, "TFT-LCD Gate and Data Bus-Line Design and Process Technologies," SID 95 Digest, pp. 11-14.

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