Gate controllable lightly doped drain mosfet devices

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357 91, 357 54, 357 59, 357 2314, H01L 2978

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active

048686174

ABSTRACT:
An LDD MOSFET structure in which gate sidewall spacers are formed of polycrystalline silicon and electrically shorted to the gate to extend gate control over the LDD region surface oxide and thereby reduce and control interface charge trapping without increasing substrate currents.

REFERENCES:
patent: 4363696 (1982-12-01), Nagakubo et al.
patent: 4597824 (1986-07-01), Shinada et al.
patent: 4654680 (1987-03-01), Yamazaki
patent: 4746219 (1988-05-01), Holloway et al.
Sai-Halasz et al., "Simple Realization of an Edge-Doped FET," IBM Technical Disclosure Bulletin, vol. 26, No. 6, Nov. 83, 3025-6.
Ting, "Silicide for Contacts and Interconnects," IEDM, 1984, pp. 110-113.

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