Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1980-06-16
1982-08-03
Weisstuch, Aaron
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
118621, 118726, 118730, 118 501, 427 38, 427 39, 204298, C23C 1500, B05B 500, C23C 1300
Patent
active
043426310
ABSTRACT:
There is disclosed a new and improved gasless ion plating apparatus and process which eliminates the prior need for electrically isolating the substrate from the evacuated chamber in which the plating process is performed. In accordance with a disclosed embodiment, one or more substrates to be plated are placed within the chamber. Also within the chamber there is disposed a plating source which includes plating material. The chamber is evacuated and the plating material is heated to vaporize the plating material. Radio frequency energy is applied to the plating source to form a plasma of positively charged plating ions from the vaporized plating material. A positive direct current bias is developed on the plating source relative to the substrates by, for example, applying a direct current positive voltage to the plating source to create an electrical field between the source and substrates for accelerating the plating ions towards the substrates for plating the same.
REFERENCES:
patent: 4016389 (1977-04-01), White
patent: 4039416 (1977-08-01), White
patent: 4096026 (1978-06-01), Takeuchi
Volkers Jack C.
White Gerald W.
Buckman Thomas W.
Forsberg Jerold M.
Illinois Tool Works Inc.
Weisstuch Aaron
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