Gaseous organic/inorganic thermal cracker for vacuum chemical ep

Details Gaseous organic/inorganic thermal cracker for vacuum chemical ep Gaseous organic/inorganic thermal cracker for vacuum chemical ep

1988-12-02

1990-02-13

Kratz, Peter

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including heat exchanger for reaction chamber or reactants...

F27D 1102

Patent

active

049005189

ABSTRACT:
A thermal cracking apparatus for cracking organic or inorganic gases is described. More particularly, the thermal cracker cracks inorganic gases such as arsine and phosphine for use in the growth of III-V compound semiconductor layers. The design of the apparatus minimizes the uptake of contaminants into the cracked gas stream.

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