Coating apparatus – With cutting – punching or tearing of work – Web or sheet work
Patent
1976-09-29
1978-06-27
Reynolds, Wm. Carter
Coating apparatus
With cutting, punching or tearing of work
Web or sheet work
118500, C23C 1100
Patent
active
040968227
ABSTRACT:
A gaseous atmosphere control apparatus for heat-treating semiconductors in a uniform gaseous atmosphere condition is disclosed. The control apparatus is provided with a reaction pipe through which semiconductor wafers are transferred to be heat-treated. A gas distribution pipe is fixed to the inside wall of the reaction pipe for guiding the transfer of the wafers and supplying heat-treating gas in the reaction pipe. The distribution pipe is provided with a plurality of blow-off holes, the diameter thereof being made wider as the pipe extends longitudinally, to thereby control the gaseous atmosphere condition in the reaction pipe to be uniform.
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patent: 3602192 (1971-08-01), Grochowski et al.
patent: 3678893 (1972-07-01), Bell
patent: 3750620 (1973-08-01), Eversteijn et al.
patent: 3922467 (1975-11-01), Pinchon
patent: 4018183 (1977-04-01), Meuleman
patent: 4018184 (1977-04-01), Nagasawa et al.
patent: 4069009 (1978-01-01), Yamawaki et al.
Eshbach et al., IBM Technical Disclosure Bulletin, vol. 13, No. 6, Nov. 1970.
Aoki Katsuo
Hara Kunihiko
Ina Osamu
Oka Yoshio
Suzuki Takao
Nippondenso Co. Ltd.
Reynolds Wm. Carter
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