Measuring and testing – Gas analysis – Detector detail
Patent
1993-12-06
1995-02-07
Williams, Hezron E.
Measuring and testing
Gas analysis
Detector detail
257414, 204431, 324 715, H01L 2960, G01N 2700
Patent
active
053867157
ABSTRACT:
An embodiment of a sensing element (10) for a gas vapor detector (24) is formed from a gold-palladium alloy. The sensing element (10) is highly sensitive to phosphine or arsine gas. The by volume palladium concentration of the sensing element is typically less than 20%. The sensing element (10) is used as an active element in a gas vapor detector (24).
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K. Evans et al., "Effect of Phospine on the Work Function Change", Materials Developments in Microelectronic Packaging Conference Proceedings, pp. 359-364, Aug. 19-22, 1991.
X. L. Zhou et al., "A Comparative Study of PF.sub.3, PH.sub.3 and P(CH.sub.3).sub.3 On Clean, K-Covered Ag(111)", Surface Science 221, 1989, pp. 534-552.
Chung Young S.
Evans Keenan L.
Glaunsinger William
Sorensen Ian W.
Koch William E.
Motorola Inc.
Wiggins J. David
Williams Hezron E.
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