Gas tube for passing plasma generating gases

Details Gas tube for passing plasma generating gases Gas tube for passing plasma generating gases

1997-06-05

1998-09-29

Nguyen, Kiet T.

Radiant energy

Fluent material containment, support or transfer means

With irradiating source or radiating fluent material

250428, G01N 2117

Patent

active

058148183

ABSTRACT:
A gas tube for passing plasma generating gases, having high UV transmittance and corrosion resistance against corrosive gases is disclosed. The tube is composed of a longitudinally extended throughhole and a thin circumferential wall and is provided with a means for radiating UV rays directed to an upstream portion thereof from outside. The wall is formed of a light-pervious alumina ceramic, and has a center-line mean roughness (R.sub.a) of not more than 1.0 .mu.m in a portion exposed to gas plasma.

REFERENCES:
patent: 5486904 (1996-01-01), Horn et al.

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