Gas transmitter with selective gas permeable surfaces

Details Gas transmitter with selective gas permeable surfaces Gas transmitter with selective gas permeable surfaces

2002-11-14

2008-09-09

Greene, Jason M (Department: 1797)

Gas separation: apparatus

Apparatus for selective diffusion of gases

C096S011000, C095S045000, C095S053000, C073S863110, C073S863230

Reexamination Certificate

active

07422627

ABSTRACT:
A gas transmitter having selective gas permeable surfaces includes a support disc that is provided with a plurality of through openings. The support disc is made from a semiconductor material. The transmitter further includes a membrane covering the openings in the support disc thereby forming the selective gas permeable surfaces and further controls the temperature of the membrane.

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patent: 7201831 (2007-04-01), Vincent
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patent: 195 21 275 (1996-12-01), None
patent: 100 19 287 (2001-10-01), None
patent: 96/41677 (1996-12-01), None

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