Gas supply unit, gas supply method and exposure system

Details Gas supply unit, gas supply method and exposure system Gas supply unit, gas supply method and exposure system

2007-08-14

2007-08-14

Vanore, David A. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C355S030000, C355S035000

Reexamination Certificate

active

11282621

ABSTRACT:
A gas supply unit supplies gas to a certain space via a channel, and includes a first switch mechanism located in the channel for selectively changing the channel of the gas.

REFERENCES:
patent: 4540466 (1985-09-01), Nishizawa
patent: 6633364 (2003-10-01), Hayashi
patent: 6987276 (2006-01-01), Nakamura
patent: 7145629 (2006-12-01), Nakano

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