Gas supply unit, gas supply method and exposure system

Radiant energy – Radiant energy generation and sources – With radiation modifying member

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C355S030000, C355S035000

Reexamination Certificate

active

11282621

ABSTRACT:
A gas supply unit supplies gas to a certain space via a channel, and includes a first switch mechanism located in the channel for selectively changing the channel of the gas.

REFERENCES:
patent: 4540466 (1985-09-01), Nishizawa
patent: 6633364 (2003-10-01), Hayashi
patent: 6987276 (2006-01-01), Nakamura
patent: 7145629 (2006-12-01), Nakano

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Gas supply unit, gas supply method and exposure system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Gas supply unit, gas supply method and exposure system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gas supply unit, gas supply method and exposure system will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3895843

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.