Gas supply unit

Details Gas supply unit Gas supply unit

2006-03-28

2006-03-28

Fox, John (Department: 3753)

Fluid handling

Systems

With flow control means for branched passages

Reexamination Certificate

active

07017609

ABSTRACT:
A gas supply unit includes fluid control devices and piping blocks so that the fluid control devices are mounted on the upper surfaces of the piping blocks and thus connected with each other, constituting a part of a gas supply line. A filter block including a filter element in a passage providing communication between the fluid control device and the piping block is connected between the fluid control device and the piping block.

REFERENCES:
patent: 6123340 (2000-09-01), Sprafka et al.
patent: 6273139 (2001-08-01), Ohmi et al.
patent: 6659131 (2003-12-01), Tsourides

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