Gas supply unit

Fluid handling – Systems – With flow control means for branched passages

Reexamination Certificate

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Reexamination Certificate

active

06886599

ABSTRACT:
A gas supply unit includes a base member, two or more fluid control devices, and a plurality of passage blocks attached to an upper surface of the base member and lower surfaces of the fluid control devices to connect the fluid control devices in fluid communication. One of the passage blocks is provided with an inlet port and an outlet port, a filter cavity sealingly formed between the inlet port and the outlet port, and a filter built-in the filter cavity.

REFERENCES:
patent: 5605179 (1997-02-01), Strong, Jr. et al.
patent: 6123340 (2000-09-01), Sprafka et al.
patent: 6149718 (2000-11-01), Cowan et al.
patent: 6283143 (2001-09-01), Adachi, Jr. et al.
patent: 6659131 (2003-12-01), Tsourides
patent: A 11-165012 (1999-06-01), None

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