Fluid handling – Systems – With flow control means for branched passages
Reexamination Certificate
2005-05-03
2005-05-03
Fox, John (Department: 3753)
Fluid handling
Systems
With flow control means for branched passages
Reexamination Certificate
active
06886599
ABSTRACT:
A gas supply unit includes a base member, two or more fluid control devices, and a plurality of passage blocks attached to an upper surface of the base member and lower surfaces of the fluid control devices to connect the fluid control devices in fluid communication. One of the passage blocks is provided with an inlet port and an outlet port, a filter cavity sealingly formed between the inlet port and the outlet port, and a filter built-in the filter cavity.
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patent: 6149718 (2000-11-01), Cowan et al.
patent: 6283143 (2001-09-01), Adachi, Jr. et al.
patent: 6659131 (2003-12-01), Tsourides
patent: A 11-165012 (1999-06-01), None
Ichikawa Masaki
Isayama Satoru
Miwa Toshikazu
Nishida Shigenobu
CKD Corporation
Fox John
Oliff & Berridg,e PLC
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