Gas supply system

Details Gas supply system Gas supply system

1992-09-09

1994-05-03

Gromada, Denise

Drying and gas or vapor contact with solids

Apparatus

Vacuum

34402, F26B 1330

Patent

active

053075684

ABSTRACT:
A gas supply system includes a gas source containing a process gas to be supplied in a reduced-pressure container, a piping unit including a metallic pipe through which the process gas circulates and arranged between the gas supply source and the reduced-pressure container, and a duct formed of a metallic and/or nonmetallic pipe and arranged between the piping unit and the reduced-pressure container. At least part of the duct is formed of an austenitic stainless steel containing 6% or more of molybdenum by weight.

REFERENCES:
patent: 5035065 (1991-07-01), Parkinson

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