Gas supply piping device for a process apparatus

Details Gas supply piping device for a process apparatus Gas supply piping device for a process apparatus

1993-09-13

1994-05-24

Fox, John C.

Fluid handling

Systems

Multiple inlet with multiple outlet

137240, B08B 902

Patent

active

053139828

ABSTRACT:
A gas supply pipeline system for process equipment which is adapted to supply at least two kinds of process gas. The system includes two independent flow passages formed between each process gas supply pipeline and a purge gas supply pipeline. The system further includes plurality of flow passages each of which is connected between one of the process gas supply pipelines and the process apparatus. Each of the process gas supply pipelines can be purged independently and the stagnation of gas in the pipelines which are not in use can be prevented by flowing purge gas constantly therethrough.

REFERENCES:
patent: 4446815 (1984-05-01), Kalbskopf et al.
patent: 4714091 (1987-12-01), Wagner
patent: 4726399 (1988-02-01), Miller
patent: 4887645 (1989-12-01), Kerger
patent: 4917136 (1990-04-01), Ohmi et al.

Affiliated with

Also associated with

Rating

Gas supply piping device for a process apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Gas supply piping device for a process apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gas supply piping device for a process apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1966592