Coating processes – Optical element produced
Reexamination Certificate
2004-12-16
2008-08-19
Chen, Bret (Department: 1792)
Coating processes
Optical element produced
C427S255230, C118S728000
Reexamination Certificate
active
07413767
ABSTRACT:
A method for producing optical functional coatings comprising niobium, tantalum, titanium or aluminum by supplying a precursor gas of low vapor pressure in a CVD coating system. A precursor selected from the group consisting of Nb, Ta, Ti, and Al compounds having a vapor pressure is maintained within a first supply container at a first temperature T1and a first pressure p1. Precursor vapor of the precursor is supplied from the first supply container to an intermediate storage device through a first gas line which fluidly communicates the first supply container and the intermediate storage device. A carrier gas or reaction gas is supplied to the first gas line such that a mixture of the precursor with the carrier gas or the reaction gas is provided. The mixture is maintained in the intermediate storage device at a constant second pressure p2lower than the first pressure p1and at a second temperature T2lower than the first temperature T1, and the mixture is supplied from the intermediate storage device through a second gas line.
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Bauch Hartmut
Bewig Lars
Klippe Lutz
Küpper Thomas
Baker & Daniels LLP
Chen Bret
Schott AG
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