Gas supply device for semiconductor manufacturing apparatus

Details Gas supply device for semiconductor manufacturing apparatus Gas supply device for semiconductor manufacturing apparatus

1997-10-15

2000-01-11

Hepperle, Stephen M.

Fluid handling

With cleaner, lubrication added to fluid or liquid sealing...

Cleaning or steam sterilizing

137597, 137613, F17D 104

Patent

active

060124784

ABSTRACT:
A gas supply device for a semiconductor manufacturing apparatus supplies various kinds of fabrication gases to each apparatus in a fab line through non-overlapping supply pipes. The gas supply device includes a gas cabinet in which a plurality of gas containers are mounted each containing one of a plurality of fabrication gases. The gas supply device further includes a plurality of gas lines coupled to the gas cabinet, and a distributor that distributes the plurality of fabrication gases introduced through gas lines from the gas cabinet to supply the fabrication gases to each fabrication apparatus in a fab line through the non-overlapping supply pipes.

REFERENCES:
patent: 4869301 (1989-09-01), Ohmi et al.
patent: 4917136 (1990-04-01), Ohmi et al.
patent: 5240024 (1993-08-01), Moore et al.
patent: 5605179 (1997-02-01), Strong, Jr. et al.
patent: 5749389 (1998-05-01), Ritrosi et al.

Affiliated with

Also associated with

Rating

Gas supply device for semiconductor manufacturing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Gas supply device for semiconductor manufacturing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gas supply device for semiconductor manufacturing apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1455046