Gas stream treatment method for removing per-fluorocarbons

Details Gas stream treatment method for removing per-fluorocarbons Gas stream treatment method for removing per-fluorocarbons

1995-02-28

1995-11-21

Lewis, Michael

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

Halogenous component

4232451, 423490, 423497, 423210, 588206, 588248, B01J 3102

Patent

active

054684595

ABSTRACT:
A per-fluorocarbon containing gas is treated by contacting per-fluorocarbon contained within the gas with calcium hydride at a temperature in a range of between about 450 and 900.degree. C. The calcium hydride can be contained in a bed mixed with silicon or calcium oxide and such bed can be used in conjunction with a downstream bed of calcium oxide to remove any hydrogen fluoride produced. Also, an upstream bed of calcium fluoride can be used to treat acid gases in case of semiconductor processing applications of the present invention.

REFERENCES:
patent: 4937065 (1990-06-01), Maurer et al.
patent: 5176897 (1993-01-01), Lester
patent: 5213767 (1993-05-01), Smith et al.
patent: 5245112 (1993-09-01), Hoshimoto et al.
patent: 5260036 (1993-11-01), Weigold et al.
patent: 5276249 (1994-01-01), Greene et al.
patent: 5284605 (1994-02-01), Nicolas
patent: 5298229 (1994-03-01), Hardwick
patent: 5304702 (1994-04-01), Weiss et al.
patent: 5322674 (1994-06-01), Mori
patent: 5354962 (1994-11-01), Mizuno et al.

Affiliated with

Also associated with

Rating

Gas stream treatment method for removing per-fluorocarbons does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Gas stream treatment method for removing per-fluorocarbons, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gas stream treatment method for removing per-fluorocarbons will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1135121