Gas storage and dispensing system for variable conductance...

Details Gas storage and dispensing system for variable conductance... Gas storage and dispensing system for variable conductance...

2007-10-23

2007-10-23

Krishnamurthy, Ramesh (Department: 3753)

Fluid handling

Processes

Involving pressure control

C137S486000, C137S487500, C137S590000, C222S003000, C700S283000

Reexamination Certificate

active

11311199

ABSTRACT:
A gas supply system arranged for dispensing of gas at a predetermined flow rate. The system employs a gas dispensing flow circuitry arranged for dispensing gas at selectively variable gas flow conductance conditions, to maintain the flow rate of the dispensed gas at a predetermined, e.g., constant, value in the operation of the system. The gas dispensing flow circuitry may include an array of dispensed gas flow passages, each of a differing conductance, or alternatively a variable conductance gas flow passage equipped with a variable conductance assembly for modulating the gas flow conductance of the passage, in response to sensed pressure of the gas or other system parameter. The system permits the flow rate of a dispensed gas to be maintained at a consistent desired level, despite the progressive decline in source gas pressure as the gas source vessel is depleted in use.

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