Gas sensor with protective gate, method of forming the sensor, a

Details Gas sensor with protective gate, method of forming the sensor, a Gas sensor with protective gate, method of forming the sensor, a

1998-07-27

2000-03-28

Williams, Hezron

Measuring and testing

Gas analysis

Detector detail

422 90, G01N 700, G01N 2704

Patent

active

060416432

ABSTRACT:
A gas sensor determines the presence of at least one designated gas in a gaseous environment. The gas sensor comprises a semiconductor substrate; a thin insulator layer disposed on the semiconductor substrate; a catalytic metallic gate disposed on the thin insulator layer; and a chemically modified layer disposed on the catalytic metal gate. The chemically modified layer comprises a material that protects the sensor from corrosive gases and interference from at least one foreign matter and water, alters at least one of surface chemical properties and surface physical properties of the sensor, and passes only the designated gas therethrough.

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