Gas sensor with protective gate, method of forming the sensor, a

Details Gas sensor with protective gate, method of forming the sensor, a Gas sensor with protective gate, method of forming the sensor, a

1999-11-23

2000-12-05

Williams, Hezron

Measuring and testing

Gas analysis

Detector detail

422 88, G01N 700, G01N 2704

Patent

active

061551007

ABSTRACT:
A gas sensor determines the presence of at least one designated gas in a gaseous environment. The gas sensor comprises a semiconductor substrate; a thin insulator layer disposed on the semiconductor substrate; a catalytic metallic gate layer disposed on the thin insulator layer; and a chemically modified protective layer disposed on the catalytic metal gate. The chemically modified layer comprises a material that protects the sensor from corrosive gases and interference from at least one foreign matter and water, alters at least one of surface chemical properties and surface physical properties of the sensor, and passes only the designated gas therethrough.

REFERENCES:
patent: 3844160 (1974-10-01), Yamaoka
patent: 3864628 (1975-02-01), Klass et al.
patent: 4112737 (1978-09-01), Morgan
patent: 4218298 (1980-08-01), Shimada et al.
patent: 4347732 (1982-09-01), Leary
patent: 4354308 (1982-10-01), Shimada et al.
patent: 4931851 (1990-06-01), Sibbald et al
patent: 4935181 (1990-06-01), Theophilou et al.
patent: 4947104 (1990-08-01), Pyke
patent: 4953387 (1990-09-01), Johnson et al.
patent: 5394735 (1995-03-01), Fang et al.
patent: 5417821 (1995-05-01), Pyke
patent: 5431883 (1995-07-01), Barraud
Sundgren et al., Meas. Sci.Technol. 2, "Artificial Neural Networks and Gas Sensor Arrays: Quantification of Individual Components in a Gas Mixture", (1991), pp. 464-469.

Affiliated with

Also associated with

Rating

Gas sensor with protective gate, method of forming the sensor, a does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Gas sensor with protective gate, method of forming the sensor, a, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gas sensor with protective gate, method of forming the sensor, a will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-950303