Gas sensor using ionic conductor

Details Gas sensor using ionic conductor Gas sensor using ionic conductor

1994-12-27

1996-05-28

Tung, T.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

204426, G01N 27409

Patent

active

055207898

ABSTRACT:
A gas sensor using an ionic conductor has a thin-film gas detection portion on an alumina substrate. The gas detection portion comprises a zirconia ionic conductor layer, a pair of platinum electrodes provided with the ionic conductor layer interposed therebetween, and a pair of junction layers positioned between the ionic conductor layer and each electrode and formed in a state in which the substances of the ionic conductor layers and the electrodes are mixed therein.
The gas sensor using an ionic conductor is formed by sequentially forming a first electrode, a first junction layer, an ionic conductor layer, a second junction layer, and a second electrode by a physical vapor deposition method on a substrate, wherein the first and second junction layers are formed to be in a state in which the substances of the ionic conductor layers and the electrodes are both present.

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