Gas sensor and method of producing the same

Details Gas sensor and method of producing the same Gas sensor and method of producing the same

1985-06-24

1987-12-15

Goldberg, E. A.

Electrical resistors

Resistance value responsive to a condition

Gas, vapor, or moisture absorbing or collecting

427 34, 29592R, 29610R, H01L 700

Patent

active

047136464

ABSTRACT:
A gas sensor includes a pair of electrodes printed on an electrically insulating substrate, a sensitive layer deposited on tip portions of the electrodes and a part of the substrate adjacent to the tip portions and bridging the space between the electrodes at the tip portion, and a protective film deposited on the electrodes and a part of the substrate adjacent to the tip portion so that a part of each electrode covered with the sensitive layer is free of the protective film. The sensitive layer is formed by depositing titanium oxide by plasma spraying on the substrate, and then heat-treating the deposited titanium oxide, so as to provide a diffusion reactive layer between the sensitive layer and the substrate and to form fine grooves on the surface of the sensitive layer.

REFERENCES:
patent: 3197335 (1965-07-01), Leszynski
patent: 4299859 (1981-11-01), Romine
patent: 4324761 (1982-04-01), Harris
patent: 4377801 (1983-03-01), Weber
patent: 4505947 (1985-03-01), Vukanovic et al.
patent: 4535316 (1985-08-01), Wertheimer et al.
patent: 4536640 (1985-08-01), Vukanovic
patent: 4580439 (1986-04-01), Manaka

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