Gas sensor and method of fabricating same

Chemistry: electrical and wave energy – Apparatus – Electrolytic

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Details

29592R, 204425, 204426, 357 25, G01N 2758

Patent

active

046683747

ABSTRACT:
A rapid-response gas sensor for measuring the relative presence of a gas in a mixture of gases and its method of manufacture. The sensor is fabricated using microelectronics technology to form multiple thin-film solid-electrolyte pump and sense cells within a hermetically sealed sensor cavity.

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