Gas sensor and method for manufacturing the same

Details Gas sensor and method for manufacturing the same Gas sensor and method for manufacturing the same

1997-05-12

2000-01-11

Williams, Hezron

Measuring and testing

Gas analysis

Detector detail

422 90, G01N 700, G01N 2704

Patent

active

060123273

ABSTRACT:
A gas sensor and method for manufacturing a gas sensor is provided. In order to increase the selectivity and the sensitivity to a gas to be measured, a gas-sensitive gallium oxide layer of a gas sensor is coated with a filter layer that comprises silicon dioxide. In an alternative embodiment, the gallium oxide layer can be coated with a gas-sensitive metal oxide layer made of titanium oxide, aluminum vanadate, tungsten oxide or tantalum oxide.

REFERENCES:
patent: 4347732 (1982-09-01), Leary
patent: 4601914 (1986-07-01), Barnes et al.
patent: 5635628 (1997-06-01), Fleischer et al.
patent: 5767388 (1998-06-01), Fleischer et al.

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