Gas sensor and method for fabricating the same

Details Gas sensor and method for fabricating the same Gas sensor and method for fabricating the same

1996-10-11

1998-07-07

Williams, Hezron E.

Measuring and testing

Gas analysis

Detector detail

73 2334, 338 34, 422 83, 422 98, 427101, 427103, G01N 2712, H01L 700, H01L 2966

Patent

active

057772070

ABSTRACT:
Air pollution gas sensor which efficiently detects smell from smoking, ordinary stinks such as TMA and CH3SH, smell of Kimchi, acetaldehyde, and etc. and also a method for fabricating the same is revealed and described including a substrate, a heater formed on said substrate, electrodes each formed on said substrate insulated from the heater, and a sensing layer formed of SnO.sub.2, including WO.sub.3 on said substrate including said electrodes, with the method for fabricating the gas sensor including the steps of forming the heater on the substrate, forming the electrodes on the substrate insulated from the heater, and forming a sensing layer of SnO.sub.2 including WO.sub.3 on the substrate including the electrodes.

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