Measuring and testing – Gas analysis – Detector detail
Patent
1995-10-26
1999-02-02
Brock, Michael
Measuring and testing
Gas analysis
Detector detail
73 2331, 73 2901, 422 83, G01N 2712, G01N 2726
Patent
active
058668004
ABSTRACT:
A gas sensor and a method for fabricating the same includes a semiconductor substrate, a supporting layer formed on the semiconductor substrate, the supporting layer being electrically insulative and having a pattern groove formed therein, a heater formed in the pattern groove, an electrically insulating layer formed on the heater and the supporting layer, an electrode formed on the insulating layer, and a sensing layer formed on the electrode and the insulating layer to detect a target gas of interest according to a measured change in electrical conductivity or resistance thereof.
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Hong Hyung Ki
Kim Sung Tae
Kwon Chul Han
Lee Kyuchung
Park Hyeon Soo
Brock Michael
LG Semicon Co. Ltd.
Wiggins J. David
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