Gas sensor and method for fabricating same

Measuring and testing – Gas analysis – Detector detail

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Details

73 2331, 73 2901, 422 83, G01N 2712, G01N 2726

Patent

active

058668004

ABSTRACT:
A gas sensor and a method for fabricating the same includes a semiconductor substrate, a supporting layer formed on the semiconductor substrate, the supporting layer being electrically insulative and having a pattern groove formed therein, a heater formed in the pattern groove, an electrically insulating layer formed on the heater and the supporting layer, an electrode formed on the insulating layer, and a sensing layer formed on the electrode and the insulating layer to detect a target gas of interest according to a measured change in electrical conductivity or resistance thereof.

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