Gas sensor

Details Gas sensor Gas sensor

1986-02-06

1987-03-31

Goldberg, E. A.

Electrical resistors

Resistance value responsive to a condition

Gas, vapor, or moisture absorbing or collecting

338 25, H01L 700

Patent

active

046546243

ABSTRACT:
A gas sensor has a plurality of sensor elements disposed on a common supporting substrate and a heating arrangement for generating the operating temperature necessary for measurement. The gas sensor unites sensor elements, which furnish desired measured quantities in different ways, on a common substrate while minimizing the heating capacity as much as possible and with a maximum possible sensitivity of response. To this end, a first group of sensors are configured as thin-film semiconductor sensors and a second group of sensor elements are disposed on a narrowed portion of the supporting substrate. Both groups of sensors are disposed on the same surface of the supporting substrate.

REFERENCES:
patent: 4007435 (1977-02-01), Tien
patent: 4443781 (1984-04-01), Ohta et al.
patent: 4453151 (1984-06-01), Leary et al.
patent: 4469626 (1984-09-01), Tuohig et al.

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