Gas sensor

Chemical apparatus and process disinfecting – deodorizing – preser – Analyzer – structured indicator – or manipulative laboratory... – Means for analyzing gas sample

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338 34, 338 35, 422 90, 422 94, 422 95, 422 97, G01N 2700

Patent

active

049389289

ABSTRACT:
A sensor comprising a metal heat generating member formed with a heat-resistant insulating coating of Al.sub.2 O.sub.3 or the like over its surface, and an atmosphere-sensitive layer of SnO.sub.2 or the like supported on the coating. The insulating coating is formed, for example, by alumina sol coating and thermal decomposition, or plasma CVD of an aluminum compound. The sensitive layer is formed, for example, by the thermal decomposition of an organic compound of tin, vacuum evaporation or sputtering of tin, or printing of SnO.sub.2 on the heat generating member when the member is in the form of a flat plate. At least one electrode is connected to the sensitive layer for deriving an output from the layer in response to a combustible gas, humidity or the like.

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