Gas sensor

Chemistry: electrical and wave energy – Apparatus – Electrolytic

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Details

204414, 204415, 204418, 204433, 204435, G01N 2726

Patent

active

053762550

ABSTRACT:
A planar gas sensor, in particular a pCO.sub.2 or pO.sub.2 sensor, has the following components: a pH sensor located on a flat substrate, or at least one noble metal electrode located on the substrate; a reference electrode adjacent to the pH sensor or noble metal electrode; an electrolyte layer, covering the reference electrode and the pH sensor or noble metal electrode, which is delimited by a first polymer structure; and a layer of hydrophobic material, covering the electrolyte layer and a surface region of the substrate outside the first polymer structure, which is delimited by a second polymer structure.

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Shimada, K. et al., "Application of catheter-tip i.s.f.e.t. for continuous in vivo measurement," Medical & Biological Engineering & Computing, vol. 18 (1980), pp. 741-745.
Hu, B. et al., "Carbon Dioxide Gas-Sensing Electrode Base On A pH-Isfet With Back-Side Contacts," Sensors and Actuators, vol. 17 (1989), pp. 275-278.
Tsukada, K. et al., "An Integrated Chemical Sensor with Multiple Ion and Gas Sensors," Sensors and Actuators B, vol. 2 (1990), pp. 291-295.
Gopel, W. et al., "Sensors: A Comprehensive Survey," vol. 2, VCH Verlagsgesellschaft mbH, Weinheim 1991, pp. 488 and 489.
Cammann, Karl, "Das Arbeiten mit ionenselektiven Elektroden," Springer-Verlag Berlin, Heidelberg 1977, pp. 95-100.

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