Gas sensor

Details Gas sensor Gas sensor

1997-06-27

1998-11-17

Williams, Herzon E.

Measuring and testing

Gas analysis

Detector detail

174262, 338 34, G01N 700, H01R 909, H01C 700

Patent

active

058378863

ABSTRACT:
A film heater and thick-film electrode pads are provided on one main surface of a heat-resistant insulating substrate and are connected by through holes to a metal oxide semiconductor film on the tail surface. Pads are made of a gold alloy such as Au--Pt and connected to leads of Pt--W, etc.

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