Electrical resistors – Resistance value responsive to a condition – Gas – vapor – or moisture absorbing or collecting
Patent
1981-10-05
1983-08-16
Albritton, C. L.
Electrical resistors
Resistance value responsive to a condition
Gas, vapor, or moisture absorbing or collecting
338308, 338309, H01L 700
Patent
active
043994245
ABSTRACT:
A semiconductor gas sensor comprises an insulating substrate (11) on which a resistive heater track (15) coupled to a pair of electrodes (12, 14) is deposited. A film (16) of a semiconductive metal oxide, typically a doped oxide, is ion-plated on to the assembly so as to contact the resistive track (15) and a further electrode (13). Exposure of the device to a particular gas, e.g. hydrogen sulphide, reduces the resistivity of the semiconductive film (16), this change being detected via an amplifier circuit (not shown). In an alternative version of the sensor (FIGS. 5a, 5b and 6) the heater is disposed under a dielectric layer, the semiconductive film being ion-plated onto the dielectric layer and electrodes therein.
REFERENCES:
patent: 3479257 (1969-11-01), Shaver
patent: 3901067 (1975-08-01), Broadman, Jr. et al.
patent: 4343768 (1982-08-01), Kimura
Albritton C. L.
IT&T Industries, Inc.
Kristofferson T. E.
Stolzy A. D.
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