Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Chemically responsive
Patent
1998-05-29
2000-02-22
Mulpuri, Savitri
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Chemically responsive
438 92, 438572, H01L 21238
Patent
active
060279540
ABSTRACT:
A diode for sensing hydrogen and hydrocarbons and the process for manufacturing the diode are disclosed. The diode is a Schottky diode which has a palladium chrome contact on the C-face of an n-type 6H Silicon carbide epilayer. The epilayer is grown on the C-face of a 6H silicon carbide substrate. The diode is capable of measuring low concentrations of hydrogen and hydrocarbons at high temperatures, for example, 800.degree. C. The diode is both sensitive and stable at elevated temperatures.
REFERENCES:
patent: 3597270 (1971-08-01), Scott-Monck et al.
patent: 3645785 (1972-02-01), Hentzschel
patent: 3660154 (1972-05-01), Scott-Monck et al.
patent: 4622736 (1986-11-01), Drobny
patent: 5270252 (1993-12-01), Papanicolaou
patent: 5270554 (1993-12-01), Palmour
patent: 5296406 (1994-03-01), Readdie et al.
patent: 5362975 (1994-11-01), von Windheim et al.
patent: 5399988 (1995-03-01), Baliga
patent: 5442200 (1995-08-01), Tischler
patent: 5520753 (1996-05-01), Hunter
patent: 5612232 (1997-03-01), Thero et al.
patent: 5635412 (1997-06-01), Baliga et al.
patent: 5929523 (1999-07-01), Parsons
Tobias, et al. "Fast Chemical Sensing with Metal Insulator Silicon Carbide Structures" IEE Elector Device Letters, vol. 18; pp.287-289 (Jun. 6, 1997).
Karlstein, et al. "Electrical Properties of MIS Structures on 6N-Sic". Linkoping University, Conference pp. X-17 to X-22. (Jun. 5-10, 1994).
Mulpuri Savitri
Stone Kent N.
The United States of America as represented by the Administrator
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