Gas sensing device

Measuring and testing – Gas analysis – Gas chromatography

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G01N 2712

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active

043133380

ABSTRACT:
A gas sensing device comprises a gas sensing element comprising a gas-sensitie resistive film formed of an aggregate of ultrafine particles of a suitable material deposited on the surface of a substrate of an electrical insulator formed with electrodes.

REFERENCES:
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patent: 3719797 (1973-03-01), Andrews, Jr., et al.
patent: 3793605 (1974-02-01), Fehlner
patent: 4058368 (1977-11-01), Svensson et al.
L. Stiblert et al., "Hydrogen Leak Detector Using a Pd-Gate MOS Transistor," Rev. Sci. Instrum., vol. 46, No. 9, pp. 1206-1208, Sep. 1975.
S. Yatsuya et al., "Formation of Ultrafine Metal Particles by Gas-Evaporation Tech.", Journal of Crystal Growth, vol. 24-25, pp. 319-322, 1974.
C. G. Granqvist et al., "Ultrafine Metal Particles," Journal of Applied Physics, vol. 47, No. 5, pp. 2200-2219, May 1976.
M. Kato, "Preparation of Ultrafine Particles of Refractory Oxides by Gas-Evap. Method," Japanese Journal of Applied Physics, vol. 15, No. 5, pp. 757-760, May 1976.
C. Kaito et al., "Electron Microscopic Study of Metal Oxide Smoke Particles Prepared by Burning Metals in Ar-O.sub.2 Gas", Japanese Journal of Applied Physics, vol. 16, pp. 697-704, May 1977.
S. Ogawa et al., "Tin Fine Particle Film Humidity Sensor", Report of Government Industrial Research Institute, Osaka, No. 66, pp. 6-8, 1975.
S. Ogawa et al., "Humidity Sensor Using Fine Particle Film of Tin Oxide", Journal of the Institute of Electronics and Comm. Eng. of Japan, vol. 78, No. 42, pp. 35-38, May 1978.
Figaro Gas Sensor TGS, Figaro Engineering Inc., No. 813, Jul. 1978.

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