Coherent light generators – Particular active media – Gas
Patent
1993-07-16
1995-08-08
Bovernick, Rodney B.
Coherent light generators
Particular active media
Gas
372 57, 372 58, 372 60, H01S 322
Patent
active
054405785
ABSTRACT:
An excimer gas laser using a fluorine/krypton
eon gas mixture is provided with separate fluorine/krypton
eon and krypton
eon gas sources for use in replenishing the gas mixture. A bleed-down mechanism is also provided for draining a portion of the gas mixture from the excimer laser. A control mechanism controls operation of the separate fluorine/krypton
eon and krypton
eon sources and the bleed-down mechanism to selectively vary the gas mixture within the excimer laser to maintain an overall optimal laser efficiency. Preferably, the control system monitors operational parameters of the excimer laser including gain, wavelength, bandwidth and pulse rate, to determine whether the gas mixture within the excimer laser may have changed from an optimal mixture. The control system controls operation of the separate fluorine/krypton
eon and krypton
eon sources to compensate for changes in the operation parameters of the laser to thereby maintain high overall laser efficiency. Alternatively, gas replenishment is controlled subject to pre-determined empirically-based gas replenishment strategies.
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Bovernick Rodney B.
Cymer Laser Technologies
Sanghavi Hemang
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