Gas purification system

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Waste gas purifier

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Details

55270, 95 11, 95118, 95138, 96109, 96111, 96121, 422177, 422190, 422193, 422239, 423262, B01D 5314, B01D 5330, B01J 804, C01B 2300

Patent

active

053913582

ABSTRACT:
Processes and systems for purifying high purity helium group gas which may have been contaminated with water, oxygen and/or hydrogen during its transmission to customers' sites.

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patent: 5123375 (1992-06-01), Hansen
patent: 5163980 (1992-11-01), Kovach
patent: 5238658 (1993-08-01), Makioka et al.

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