Gas separation: processes – With control responsive to sensed condition – Pressure sensed
Patent
1995-05-15
1996-03-05
Warden, Robert J.
Gas separation: processes
With control responsive to sensed condition
Pressure sensed
55274, 96113, 422119, B01D 4646, B01D 5304
Patent
active
054963931
ABSTRACT:
A gas purification apparatus has two gas purification units which are alternately operated. A gas purification capacity measuring means includes a means including valves for separating a target gas purification unit from a line, an evacuating means for evacuating the separated gas purification unit at a high vacuum, a means including a supply tank for supplying a predetermined very small amount of an impurity gas to an inlet of the high-vacuum separated gas purification unit, an auxiliary tank (e.g., a pressure reduction tank, a metering tank, and a pressure reduction valve), and a vacuum gauge for measuring a change in pressure at the outlet upon supply of the impurity gas to the inlet. In the gas purification apparatus having gas purification units each incorporating a getter material, the gas purification capacity of each gas purification unit can be more accurately and easily measured.
REFERENCES:
patent: 4324568 (1982-04-01), Wilcox et al.
patent: 4986836 (1991-01-01), Tandon
patent: 5109716 (1992-05-01), Ito et al.
patent: 5150604 (1992-09-01), Succi et al.
Mori Kazuya
Otsuka Kenichi
Dawson E. Leigh
Kabushiki Kaisha Toshiba
Warden Robert J.
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