Gas purge system and methods

Details Gas purge system and methods Gas purge system and methods

2006-07-14

2008-09-02

Punnoose, Roy M (Department: 2886)

Optics: measuring and testing

For light transmission or absorption

Of fluent material

C356S369000

Reexamination Certificate

active

07420681

ABSTRACT:
Gas purge systems and methods and a spectroscopic ellipsometer are disclosed. A purge gas system may include an input beam optics housing, a collection optics housing and a gas purge manifold. The input beam optics housing may include a first gas flow path between a first gas inlet and an aperture in a first nose cone proximate a measurement position. The collection optics housing may include a second gas flow path between a second gas inlet and an aperture in a second nose cone proximate the measurement position. The gas purge manifold may be disposed between the input beam optics housing and the collection optics housing. The gas purge manifold has a third gas flow path between a third gas inlet and an aperture in the gas manifold proximate the measurement position. The ellipsometer may include input beam optics in the input beam optics housing and collection optics in the collection optics housing. First, second, and third flows of purge gas may be supplied through the input beam optics housing, collection optics housing and gas purge manifold respectively. The purge gas is delivered directly to a measurement position of a surface of a substrate through the gas purge manifold, the first nosecone and the second nose cone.

REFERENCES:
patent: 5835221 (1998-11-01), Lee et al.
patent: 6151116 (2000-11-01), Hirosawa
patent: 6222199 (2001-04-01), Freeouf
patent: 6275288 (2001-08-01), Atkinson et al.
patent: 6813026 (2004-11-01), McAninch
patent: 2002/0149774 (2002-10-01), McAninch
patent: 2004/0150820 (2004-08-01), Nikoonahad et al.

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