Pumps – Processes – Of pumping one fluid by contact or entrainment with another
Reexamination Certificate
1999-04-28
2001-02-13
Freay, Charles G. (Department: 3746)
Pumps
Processes
Of pumping one fluid by contact or entrainment with another
C417S121000, C417S131000
Reexamination Certificate
active
06186745
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates generally to devices for pumping liquid, and more particularly to a liquid pumping device that is activated by pressurized gas, and which contains an input chamber, an intermediate chamber and an output chamber.
2. Description of the Prior Art
In nearly every fluid transfer application it is necessary to provide a pump to provide the motive force to move the liquid through a liquid supply line. With the exception of gravitational systems and siphon systems, the utilization of liquid pumps is a necessity and many types of pumps have been developed throughout history. Many of the pumps are powered by rotating or reciprocating motorized devices which tend to create a vibration or pulsation in the pumped liquid and the systems that utilize such pumps. For many applications the vibration and pressure pulsation of such pumps is insignificant and such pumps provide adequate performance.
However, many liquid transfer applications involve liquids having a delicate chemical make-up and chemical processes that are adversely affected by the pulsation and vibration of pumped liquid. For such applications it is necessary to utilize a pump that does not create pulsation and vibration of the pumped fluid. Additionally, many precise chemical processes require strict control of the flow rate of the pumped liquid, and prior art pumps that induce pulsation and vibration within the pumped fluids have difficulty meeting such flow rate constraints. Semiconductor fabrication processes are one such application in which ever stricter constraints on liquid pumping parameters continue to be developed. In many particular applications within the semiconductor fabrication industry pulsation and vibration of pumped chemicals adversely affects the delicate chemical balance of processing liquids as well as the chemical reactions of the processing liquids with the semiconductor substrates in the various fabrication steps.
A need therefore exists for pumps that pump liquids without subjecting the liquids to pulsation and vibration, while providing tight control of the flow rates of the pumped liquids. The present invention, in its various embodiments disclosed herein, provides a pump system that utilizes pressurized gas to provide the motive force to continuously pump liquids through liquid flow lines. The pulsation and vibration created by the prior art pumping systems is eliminated and a strict control of pumped liquid flow rates is obtained.
SUMMARY OF THE INVENTION
The multi-chamber liquid pump of the present invention includes an input chamber, an intermediate chamber and a liquid output chamber. Pressurized gas provides the motive force for outputting liquid from the pump, such that liquid is output at a constant flow rate during pump operation. Liquid flows into the input chamber, through one or more valves into the intermediate chamber, and through one or more subsequent valves to the output chamber while liquid is constantly output from the output chamber. The system controller provides control signals to the valves to facilitate the pump's continual operation.
It is an advantage of the present invention that a liquid pump is provided which pumps liquid without vibration and pulsation.
It is another advantage of the present invention that a liquid pump is provided which pumps liquid in a smooth, constant, non-fluctuating flow.
It is a further advantage of the present invention that a liquid pump is provided that utilizes pressurized gas to provide a pumping force for the liquid.
It is yet another advantage of the present invention that a liquid pump is provided that is gas powered and provides a constant controlled liquid flow rate.
It is yet a further advantage of the present invention that a liquid pump is provided having an input chamber, an intermediate chamber and an output chamber, such that liquid flowing from the output chamber can be replaced by liquid from the input chamber through the use of the intermediate chamber.
These and other features and advantages of the present invention will become apparent to those skilled in the art upon review of the following detailed description which makes reference to the several figures of the drawing.
REFERENCES:
patent: 1979407 (1934-11-01), Pike
patent: 2158381 (1939-05-01), Raymond
patent: 2246594 (1941-06-01), Kinsella
patent: 2520175 (1950-08-01), Socke
patent: 2545303 (1951-03-01), Petrucci
patent: 2703607 (1955-03-01), Simmonds
patent: 4132242 (1979-01-01), Carroll, Jr.
patent: 4136708 (1979-01-01), Cosentino et al.
patent: 4507056 (1985-03-01), Allen
patent: 4544084 (1985-10-01), Cleland
patent: 4630753 (1986-12-01), Anscherlik
patent: 4676404 (1987-06-01), Yamazaki et al.
patent: 5294023 (1994-03-01), Ioannides et al.
patent: 5405443 (1995-04-01), Akimoto et al.
patent: 5511954 (1996-04-01), Han
patent: 5556002 (1996-09-01), Green
Chemand Corporation
Freay Charles G.
Guillot Robert O.
Oppenheimer Wolff & Donnelly LLP
LandOfFree
Gas pressurized liquid pump with intermediate chamber does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Gas pressurized liquid pump with intermediate chamber, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gas pressurized liquid pump with intermediate chamber will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2570547