Gas pressure sensor based on short-distance heat conduction...

Measuring and testing – Fluid pressure gauge – With pressure and/or temperature compensation

Reexamination Certificate

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Details

C073S717000, C073S719000, C073S725000, C438S052000, C361S283100

Reexamination Certificate

active

06860153

ABSTRACT:
A thermal pressure sensor monitors pressure by measuring effects caused by variations of thermal conductivity between a member and a substrate to which the member is adhered by stiction. The interface between the member and the substrate behaves as an extremely narrow gap. In a preferred embodiment the member is a bridge extending between a pair of cantilever arms. Two pressure sensors may be combined in a Wheatstone bridge configuration. A method for fabricating a pressure sensor according to the invention comprises forming a layer of oxide on a substrate, depositing a layer of material on the oxide layer, forming the member from the layer of material, removing the oxide layer and then bringing the member into contact with the substrate. The portion of the substrate under the member may be patterned with plateaus and valleys.

REFERENCES:
patent: 4463336 (1984-07-01), Black et al.
patent: 4684339 (1987-08-01), Bezama et al.
patent: 5318652 (1994-06-01), Horning et al.
patent: 5511428 (1996-04-01), Goldberg et al.
patent: 5557972 (1996-09-01), Jacobs et al.
patent: 5589810 (1996-12-01), Fung
patent: 5597957 (1997-01-01), Schieferdecker et al.
patent: 5706565 (1998-01-01), Sparks et al.
patent: 6127765 (2000-10-01), Fushinobu
patent: 6136630 (2000-10-01), Weigold et al.
patent: 6156585 (2000-12-01), Gogoi et al.
patent: 6343514 (2002-02-01), Smith
patent: 6465271 (2002-10-01), Ko et al.
patent: 6484585 (2002-11-01), Sittler et al.
patent: 6629465 (2003-10-01), Maluf et al.
Reyntjen et al.The Nano-Pirani—Presumably the World's Smallest Pressure Sensor, The 11th International Conference on Solid State Sensors and Actuators, Nunich, Germany, Jun. 10-14, 2001.
Chou et al.;Fabrication and Study of a Shallow-Gap Pirani Vacuum Sensor with a Linearly Measurable Atmospheric Pressure Range, Sensors and Materials, vol. 11, No. 6 (1999) pp. 383-392.
Meijer et al.;Thermal Sensors, Sensors Based on Thermal Measurements, Institute of Physics Publishing Ltd. (1994) pp. 161-168.
Mahan, Bruce H.;University Chemistry, The Properties of Gases, second edition, Addison-Wesley Publishing Company, Inc. pp. 74-76.
Madou, Marc J.;Fundamentals of Microfabrication, (1997) pp. 234-236.

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